Apparatus for machining, recording, and reproducing, using scanning probe microscope

ABSTRACT

A machining, recording, and reproducing apparatus using a scanning probe microscope comprising: a probe equipped with a probe tip at its front end, a vibration application portion consisting of a piezoelectric vibrating body and an AC voltage-generating portion, a vibration-detecting portion consisting of a quartz oscillator and a current/voltage amplifier circuit, a coarse displacement device for bringing the probe close to a surface of a sample, a sample-to-probe distance control device consisting of a Z fine displacement element and a Z servo circuit, a two-dimensional scanning device consisting of an XY fine displacement element and an XY scanning circuit, and a data-processing device for converting a measurement signal into a three-dimensional image. The probe is held to the quartz oscillator by spring pressure of a resilient body.

BACKGROUND OF THE INVENTION

The present invention relates to apparatus for machining, recording, andreproducing, using a scanning probe microscope that utilizes a quartzoscillator to control the position of a probe.

Known methods for position control in a scanning probe microscopeinclude a method consisting of detecting a tunneling current, a methodconsisting of detecting evanescent light, and a method consisting ofdetecting an atomic force. One form of scanning probe microscope makinguse of a tunneling current for the control of a probe is a scanningtunneling microscope (STM). One form of scanning probe microscope inwhich evanescent light is employed for the control of a probe is aphoton STM. However, limitations are imposed on samples capable of beingmeasured. Therefore, principal applications lie in an atomic forcemicroscope (AFM) where an atomic force is used to control the positionof a probe and in a near-field scanning optical microscope (NSOM). Onemethod of detecting an atomic force consists of detecting displacementsof a probe by means of laser light. Another method makes use ofvariations in the current generated by a quartz oscillator.

A scanning probe microscope in which laser light is used to detectdisplacements of a probe is disclosed, for example, in Patent UnexaminedPublication No. 50750/1994, entitled, "Scanning Microscope IncludingForce-Detecting Means", by Robert Erik Betzig. An example of a scanningprobe microscope in which a quartz oscillator is used to detectdisplacements of a probe is disclosed in App. Phys. Lett. 66(14), 1995,pp. 1842-1844, by Kaled Karai et al. These instruments are outlinedbelow.

FIG. 2 is a schematic view of the prior art "scanning probe microscopeusing laser light". The tip of an optical fiber 310 is machined into atapering form 70. A sample stage 20 is placed on an XYZ stage 50. Asample 30 is set on the sample stage. The optical fiber probe 70 isvibrated parallel to the sample surface, using a fine displacementelement 40. A horizontal force from the sample surface, or a shearforce, acts on the tip of the probe. Thus, the state of the vibration ofthe probe varies. To measure the state of vibration of the probe 70,laser light (not shown) used for position control is directed at thetip, and the shadow of the probe 70 is detected by a lens 90 and aphotodetector 30. The distance between the sample surface and the tip ofthe probe is controlled, using the fine displacement element 40, so thatthe shear force is kept constant, i.e., the rate at which the amplitudeor phase varies is kept constant. The shear force drops rapidly with thedistance from the sample. Utilizing this, the distance between thesample surface and the tip of the probe is kept constant on the order ofnanometers. The sample surface is raster-scanned, using the XYZ finedisplacement element 40. In this way, the topography of the samplesurface can be measured on the order of nanometers. Under thiscondition, an electric field, magnetic field, electric current, light,heat, pressure, or the like is applied to the sample surface. Thus, thesample surface can be machined or processed. In addition, informationcan be recorded by forming a distribution of machining on the samplesurface, using a sample-moving means. In addition, the information canbe reproduced by successively measuring the information machined intothe surface by the use of the sample-moving means.

FIG. 3 is a schematic view of main portions of the prior art "scanningprobe microscope using a quartz oscillator". Indicated by 400 is anoptical fiber probe, and indicated by 410 is a quartz oscillator. Theoptical fiber probe is bonded to the quartz oscillator with adhesive.The quartz oscillator is made to resonate, using a piezoelectric device(not shown) for vibrations. Vibration of the quartz oscillator vibratesthe optical fiber probe. As the tip of the probe approaches the sample,a horizontal force from the sample surface, or a shear force, acts onthe tip of the probe. Thus, the state of the vibration of the probevaries. The state of vibration of the quartz oscillator is measured bymeasuring electric charge generated by a piezoelectric effect of quartz.The distance between the sample surface and the tip of the probe iscontrolled, using a piezoelectric scanner (not shown) so that the shearforce is kept constant, i.e., the rate at which the amplitude or phasevaries is kept constant. The shear force drops rapidly with the distancefrom the sample. Utilizing this, the distance between the sample surfaceand the tip of the probe is kept constant on the order of nanometers.The sample surface is raster-scanned, using an XYZ fine displacementelement (not shown). In this manner, the topography of the samplesurface can be measured on the order of nanometers. Under thiscondition, an electric field, magnetic field, electric current, light,heat, pressure, or the like is applied to the sample surface. Thus, thesample surface can be machined or processed. In addition, informationcan be recorded by forming a distribution of machining on the samplesurface, using a sample-moving means. In addition, the information canbe reproduced by successively measuring the information machined intothe surface by the use of the sample-moving means.

The prior art scanning probe microscope described above has thefollowing disadvantages. In the scanning probe microscope using laserlight, it is directed at the sample surface near the tip of the opticalprobe, and an image (shadow) of the tip of the probe is detected fromthe reflected light to detect the shear force. Therefore, the amount ofreflected light is readily affected by the topography of the samplesurface and by the reflectivity. Hence, it is difficult to measure theamplitude of vibration, and it is difficult to precisely measure thesurface topography. Furthermore, it is not easy to align the laser lightand so the data reproducibility has posed problems. Consequently, themachining accuracy and recording accuracy have problems. It has beendifficult to reproduce the information.

In the scanning probe microscope using a quartz oscillator, the portionwhere the quartz oscillator and the optical fiber are adhesively bondedtogether tends to be a microscopic region (e.g., a square region about100 μm square). It is difficult to perform the bonding operation.Furthermore, the characteristics of the quartz oscillator device areeasily affected by the amount of adhesive, the hardness, the location atwhich they are bonded, and other factors. Thus, it is difficult toobtain an oscillator sensor with high reproducibility. For thesereasons, it has been difficult to use the instrument in industrialapplications. Where the probe is replaced, the quartz oscillator mustalso be replaced. This gives rise to an increase in the cost. Inaddition, reproducible surface topography measurement has beenimpossible to perform. Consequently, the machining accuracy andrecording accuracy have problems. It has been difficult to reproduce theinformation.

SUMMARY OF THE INVENTION

An apparatus for machining, recording, and reproducing, using a scanningprobe microscope in accordance with the present invention uses ascanning probe microscope having a probe equipped with a probe tip atits front end, a vibration application portion consisting of apiezoelectric vibrating body and an AC voltage-generating means, avibration-detecting portion consisting of a quartz oscillator and acurrent/voltage amplifier circuit, a coarse displacement means forbringing the probe close to a surface of a sample, a sample-to-probedistance control means consisting of a Z fine displacement element and aZ servo circuit, a two-dimensional scanning means consisting of an XYfine displacement element and an XY scanning circuit, and adata-processing means for converting a measurement signal into athree-dimensional image. This is characterized in that the probe is heldto the quartz oscillator by spring pressure of a resilient body. Becauseof this structure, an apparatus for machining, recording, andreproducing is provided, using the scanning probe microscope, theapparatus being characterized in that it can measure surface topographywith good reproducibility, have good machining accuracy and recordingaccuracy, and can easily reproduce information.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic view of a machining, recording, and reproducingapparatus using a scanning probe microscope in accordance with thepresent invention;

FIG. 2 is a schematic view of the prior art scanning probe microscopeusing laser light;

FIG. 3 is a schematic view of the prior art scanning probe microscopeusing a quartz oscillator;

FIG. 4 is a schematic view of Embodiment 1 of a machining, recording,and reproducing apparatus using a scanning probe microscope inaccordance with the present invention; and

FIG. 5 is a schematic view of Embodiment 2 of a machining, recording,and reproducing apparatus using a scanning probe microscope inaccordance with the present invention.

DETAILED DESCRIPTION OF THE INVENTION

FIG. 1 is a schematic view of an apparatus for machining, recording, andreproducing, using a scanning probe microscope in accordance with thepresent invention.

The apparatus for machining, recording, and reproducing, using thescanning probe microscope in accordance with the present inventioncomprises a probe 1, a vibration application portion consisting of apiezoelectric vibrating body 2 and an AC voltage-generating means 3, avibration-detecting portion consisting of a quartz oscillator 4 and acurrent/voltage amplifier circuit 5, a coarse displacement means 6 forbringing the probe close to the sample surface, a sample-to-probedistance control means consisting of a Z fine displacement element 11and a Z servo circuit 12, a two-dimensional scanning means consisting ofan XY fine displacement element 13 and an XY scanning circuit 14, and adata-processing means 15 for converting a measurement signal into athree-dimensional image. A resilient body 16 produces spring pressurethat holds the probe 1 to the quartz oscillator 4.

When the probe vibrating horizontally is brought close to the samplesurface, a shear force acts on the tip of the probe. This reduces theamplitude of the vibration. The probe and the quartz oscillator aresecured together by spring pressure and thus operate as a unit.Therefore, the decrease in the amplitude of the vibration of the proberesults in a decrease in the amplitude of the vibration of the quartzoscillator. This in turn reduces the output current, which is detectedby the current/voltage amplifier circuit. The distance between thesample and the probe is controlled with the Z fine displacement elementand the Z servo circuit to maintain the output current from the quartzoscillator constant. In this way, the tip of the probe is kept at aconstant distance from the sample surface. Under this condition, theprobe is scanned in two dimensions across the sample plane to produce athree-dimensional image. Under this condition, an electric field,magnetic field, electric current, light, heat, pressure, or the like isapplied to the sample surface. Thus, the sample surface can be machinedor processed. In addition, information can be recorded by forming adistribution of machining on the sample surface, using a sample-movingmeans. In addition, the information can be reproduced by successivelymeasuring the information machined into the surface by the use of thesample-moving means.

The distance between the probe and the sample is controlled by the useof a quartz oscillator as described above. This dispenses with a lasernormally used for position control such as in a scanning probemicroscope employing laser light. In addition, the problem of inaccuratedata due to variations in the position of the laser light and variationsin the amount of reflected light can be circumvented. The springpressure of the resilient body anchors the probe to the quartzoscillator. In the prior art probe microscope using a quartz oscillator,data would be affected by the manner in which they are adhesivelybonded. In exchanging the probe, it is only necessary, to replace theprobe. In consequence, the same quartz can be used. The reproducibilityof the measurement conditions and the reproducibility of data can beenhanced. Moreover, the replacement of only the probe gives rise tolower cost. In addition, the adhesive bonding that is difficult toperform is made unnecessary. Consequently, the instrument is made veryeasy to handle. Further, an apparatus for machining, recording, andreproducing can be accomplished, using the scanning probe microscope,the apparatus being capable of measuring surface topography with goodreproducibility. The apparatus have good machining accuracy andrecording accuracy and can easily reproduce information.

EMBODIMENTS

Embodiments of this invention are hereinafter described.

Embodiment 1

FIG. 4 is a schematic view of Embodiment 1 of apparatus for machining,recording, and reproducing, using a scanning probe microscope inaccordance with the invention. The described embodiment is a machiningapparatus using a scanning probe microscope and capable of controllingthe ambient around the sample. A quartz oscillator 4 and a piezoelectricoscillator 2 are bonded to a quartz oscillator holder 25 with adhesive.A PZT device in the form of a flat plate is used as the piezoelectricoscillator. A quartz oscillator used for a clock or watch is used as theaforementioned quartz oscillator. When an AC voltage is applied to thePZT device, it vibrates, forcing the quartz oscillator to vibrate. Ifthe vibration frequency is made coincident with the resonant frequency(e.g., 32.7 kHz) of the quartz oscillator, the quartz oscillatorresonates. Then, piezoelectric effect induces an electric charge on theelectrodes of the quartz oscillator. The resulting current is detectedby a current/voltage amplifier circuit. Since a current proportional tothe amplitude of the vibration of the quartz oscillator is produced, thestate of the vibration of the quartz oscillator can be measured from thedetected current. A cylindrical PZT scanner, a laminated PZT plate, orother structure may be conceivable as the piezoelectric oscillator, aswell as the PZT plate. All of them are embraced by the presentinvention. Furthermore, quartz oscillators used in applications otherthan clocks and watches may be used as the quartz oscillator.

A probe 1 is held to the quartz oscillator by spring pressure of aresilient body 16. The used probe is prepared by chemically etching thetip of tungsten and machining it into a tapering form. The probe can bemade of metals in this way. It may be conceivable that a cantilever ofsilicon or silicon nitride, an optical fiber, or a glass pipette ismachined into a tapering form to fabricate the probe. This is embracedby the present invention. The tapering method may include mechanicalpolishing and heating-and-elongating processing, as well as the chemicaletching. It may be considered that a magnetic film is deposited on theprobe tip to make a magnetic force-sensing probe. In addition, it may bethought that a film of gold or platinum is formed to make a conductiveprobe. All of them are embraced by the present invention. A leaf springmade of a stainless steel is used as the resilient body. Since thesensitivity of the quartz oscillator to forces is high, it is desiredthat the spring constant of the resilient body be small. In the presentinvention, a cantilever spring having a thickness of 100 μm, a width of1 mm, and a length of 10 mm is used. Besides, the resilient body may bea leaf spring of phosphor bronze and various kinds of rubber such assilicone rubber. All of them are embraced by the present invention.Furthermore, the body may be held by making use of the resilience of theprobe itself. This is also embraced by the invention. Where the body isheld by spring pressure, this pressure is measured, utilizing theoscillating characteristics of a quartz oscillator, i.e., Q-value. Wherethe probe is not held, the Q-value of the quartz oscillator is about3000, for example. Where the probe is held with a spring, the Q-value isless than 500. A Q-value preferable for the scanning probe microscope isapproximately 100 to 400. The spring pressure is adjusted so that theQ-value falls within this range.

The quartz oscillator holder 25 is held to XYZ fine displacementelements 11 and 13. A cylindrical piezoelectric device in which X-, Y-,and Z-axis scanners are combined into a unit is used as each finedisplacement element. Besides, a piezoelectric scanner in which Z-axisis separate from X- and Y-axes and electrostrictive devices may beconceivable as the fine displacement elements. These are embraced by theinvention. Other conceivable structures include piezo-stages, stagesusing parallel stages, tripod-type piezoelectric devices in whichone-axis piezoelectric devices are mounted on X-, Y-, and Z-axes,respectively, and laminar piezoelectric scanners. All of them areembraced by the present invention.

A coarse displacement means 6 is used to bring the probe close to asample 17. A coarse displacement means consisting of a stepping motorand a speed-reduction gear, a rough motion screw, or a linear guide isused as the above-described coarse displacement means. Other example ofthe coarse displacement means may consist of a Z stage to which astepping motor is added. A further example includes a stage usingpiezoelectric devices. For instance, it is a stage in which an inchwormmechanism or Z stage is combined with a piezoelectric device. All ofthem are embraced by the present invention.

The sample is held in a vacuum, using a vacuum chamber 18. In this way,the sample can be retained in a vacuum. The vacuum chamber may beprovided with a gas inlet port, and the sample may be exposed to aninert gas or reactive gas. This is also embraced by the presentinvention. Under this condition, an electric field, magnetic field,electric current, light, heat, pressure, or the like was applied fromthe tip of the probe to the sample surface. Thus, the sample surfacecould be machined or processed.

This structure can achieve a machining apparatus capable of measuringsurface topography with high reproducibility on the order of nanometersand of performing a machining operation accurately, using a scanningprobe microscope.

Embodiment 2

FIG. 5 is a schematic view of Embodiment 2 of an apparatus formachining, recording, and reproducing, using a scanning probe microscopein accordance with the present invention. The described embodiment ofthe recording and reproducing apparatus is a scanning near-field opticalmicroscope.

Light emitted by a laser light source 19 is amplitude-modulatedperiodically by an optical modulator 27 consisting of an acoustooptical(AO) modulator. Other conceivable optical modulators include anelectro-optic modulator (EO modulator) using an electric field andmechanical modulators in which an optical chopper is rotated by anelectric motor. All of them are embraced by the present invention. Themodulated laser light is introduced into the probe 1 by a coupling 21.The optical waveguide probe is held to the quartz oscillator 4 by thespring pressure of the probe itself. The light is directed at the sample17 from the aperture at the tip of the probe. Light reflected off thesample is gathered by a lens 8 via a lens 7, mirrors 23, 22, and anoptical window 24. The light is then split into two beams traveling intwo directions by a half-mirror 31. The split light beams are measuredby a photodetector 9 and a CCD camera 29. In some cases, the half-mirrormay be replaced by a dichroic mirror. To secure sufficient amount oflight, it may be possible to use no mirrors. The light detected by thephotodetector 9 is measured with high S/N, using a lock-in amplifier.The resulting signal is converted into a three-dimensional image by adata-processing means 15. The measured region on the sample surface ismoved, using an XY stage 26 for the sample. A piezoelectrically drivenstage is used as this XY stage. Other conceivable XY stage may be an XYstage in which a stepping motor is combined with an XY stage. This isalso embraced by the present invention. A heater 32 was used to heat thesample. The heater consisted of a wire of manganin wound around a samplestage of copper. Heating is done while controlling the current fed tothe heater. Conceivable examples of the heater include tungsten wire,carbon thin film, and manganin thin film. All of them are embraced bythe present invention. Using the structure described thus far, laserlight is directed at the sample surface from the aperture less than thewavelength of the optical waveguide probe while varying the sampletemperature from the low temperature of room temperature to a hightemperature. The reflected light was gathered by lenses and detected bythe photodetector. The surface topography could be measured with highreproducibility on the order of nanometers by scanning the opticalwaveguide probe across the sample plane. At the same time, thedistribution of reflected light within the sample plane could bemeasured with high resolution less than the wavelength. Informationcould be recorded on the sample surface by applying an electric field,magnetic field, electric current, light, heat, pressure, or the like. Inaddition, the recorded information can be reproduced by measuring it.

The structure described thus far has accomplished arecording-and-reproducing apparatus that is capable of measuring surfacetopography with high reproducibility on the order of nanometers andcapable of accurate recording and reproduction.

As described thus far, this invention comprises: a probe 1 equipped witha probe tip at its front end, a vibration application portion consistingof a piezoelectric vibrating body 2 and an AC voltage-generating portion3, a vibration-detecting portion consisting of a quartz oscillator 4 anda current/voltage amplifier circuit 5, a coarse displacement means 6 forbringing the probe close to a surface of a sample, a sample-to-probedistance control means consisting of a Z fine displacement element 11and a Z servo circuit 12, a two-dimensional scanning means consisting ofan XY fine displacement element 13 and an XY scanning circuit 14, and adata-processing means 15 for converting a measurement signal into athree-dimensional image. The probe 1 is held to the quartz oscillator 4by spring pressure of a resilient body 16.

As described above, the distance between the probe and the sample iscontrolled, using the quartz oscillator. This dispenses with positioncontrolling laser which would normally be used in a scanning probemicroscope using laser light. In addition, the problem of inaccuratedata due to variations in the position of the laser light and due tovariations in the amount of reflected light can be circumvented. Thespring pressure of the resilient body anchors the probe to the quartzoscillator. In the prior art probe microscope using a quartz oscillator,data would be affected by the manner in which they are adhesivelybonded. In exchanging the probe, it is only necessary to replace theprobe. In consequence, the same quartz can be used. The reproducibilityof the measurement conditions and the reproducibility of data can beenhanced. Moreover, the replacement of only the probe gives rise tolower cost. In addition, the adhesive bonding that is difficult toperform is made unnecessary. Consequently, the instrument is made veryeasy to handle. In this way, a scanning probe microscope with highreproducibility can be accomplished. Also, a machining, recording, andreproducing apparatus using the scanning probe microscope having highmachining accuracy and high recording accuracy can be realized, theapparatus being capable of reproducing information easily.

What is claimed is:
 1. In combination with a machining apparatus, ascanning probe microscope comprising:a probe having a probe tipextending in a Z direction; a vibration device having a piezoelectricvibrating body and an AC voltage generator for vibrating the probe tiprelative to a surface of a sample; a vibration detecting device having aquartz oscillator and a current/voltage amplifier circuit for detectingvibration of the probe tip; a resilient body for biasing the probe intopressure contact with the quartz oscillator; a coarse displacementdevice for effecting coarse displacement of the probe in the Z directionto bring the probe tip close to the surface of the sample; asample-to-probe distance control device having a fine displacementelement and a servo circuit for effecting fine displacement of the probetip in the Z direction; a two-dimensional scanning device having a finedisplacement element and a scanning circuit for scanning the probe in Xand Y directions to generate a measurement signal; and a data processingdevice for converting the measurement signal into a three-dimensionalimage.
 2. A machining apparatus as set forth in claim 1; wherein theprobe comprises an STM (scanning tunneling microscope) tip.
 3. Amachining apparatus as set forth in claim 1; wherein the probe comprisesan AFM (atomic force microscope) cantilever.
 4. A machining apparatus asset forth in claim 3; wherein the cantilever comprises a cantilever of amagnetic force microscope and is composed of a magnetic substance.
 5. Amachining apparatus as set forth in claim 3; wherein the cantilevercomprises a conductive cantilever; and further comprising means forapplying an electric potential to the sample surface.
 6. A machiningapparatus as set forth in claim 1; further comprising means for holdingthe sample in a vacuum.
 7. A machining apparatus as set forth in claim1; further comprising means for holding the sample in an inert gas orreactive gas.
 8. A machining apparatus as set forth in claim 1; furthercomprising a sample stage for moving a measurement position on thesample surface.
 9. A machining apparatus as set forth in claim 1;further comprising means for illuminating the surface of the sample withlight.
 10. A machining apparatus as set forth in claim 9; furthercomprising means for collecting and detecting light transmitted throughthe sample or light reflected off the surface of the sample.
 11. Amachining apparatus as set forth in claim 10; further comprising meansfor periodically modulating the light illuminated on the surface of thesample, and lock-in detecting means for measuring the light detected bythe means for collecting and detecting light.
 12. In combination with arecording-and-reproducing apparatus, a scanning probe microscopecomprising: a probe having a probe tip extending in a Z direction; avibration device having a piezoelectric vibrating body and an AC voltagegenerator for vibrating the probe tip relative to a surface of a sample;a vibration detecting device having a quartz oscillator and acurrent/voltage amplifier circuit for detecting vibration of the probetip; a resilient body for biasing the probe into pressure contact withthe quartz oscillator; a coarse displacement device for effecting coarsedisplacement of the probe in the Z direction to bring the probe tipclose to the surface of the sample; a sample-to-probe distance controldevice having a fine displacement element and a servo circuit foreffecting fine displacement of the probe tip in the Z direction; atwo-dimensional scanning device having a fine displacement element and ascanning circuit for scanning the probe in X and Y directions togenerate a measurement signal; and a data processing device forconverting the measurement signal into a three-dimensional image.
 13. Arecording-and-reproducing apparatus as set forth in claim 12; whereinthe probe comprises an STM (scanning tunneling microscope) tip.
 14. Arecording-and-reproducing apparatus as set forth in claim 12; whereinthe probe comprises an AFM (atomic force microscope) cantilever.
 15. Arecording-and-reproducing apparatus as set forth in claim 14; whereinthe cantilever comprises a cantilever of a magnetic force microscope andis composed of a magnetic substance.
 16. A recording-and-reproducingapparatus as set forth in claim 14; wherein the cantilever comprises aconductive cantilever and further comprising means for applying anelectric potential to the sample surface.
 17. Arecording-and-reproducing apparatus as set forth in claim 12; furthercomprising means for holding the sample in a vacuum.
 18. Arecording-and-reproducing apparatus as set forth in claim 12; furthercomprising means for holding the sample in an inert gas or reactive gas.19. A recording-and-reproducing apparatus as set forth in claim 12;further comprising a sample stage for moving a measurement position onthe sample surface.
 20. A recording-and-reproducing apparatus as setforth in claim 12; further comprising means for illuminating the surfaceof the sample with light.
 21. A recording-and-reproducing apparatus asset forth in claim 20; further comprising means for collecting anddetecting light transmitted through the sample or light reflected offthe surface of the sample.
 22. A recording-and-reproducing apparatus asset forth in claim 21; further comprising means for periodicallymodulating the light illuminated on the surface of the sample, andlock-in detecting means for measuring the light detected by the meansfor collecting and detecting light.
 23. In combination with a machiningapparatus, a scanning probe microscope comprising: a probe extending ina Z direction; vibrating means for vibrating the probe relative to asurface of a sample; vibration detecting means for detecting the probevibration; biasing means for biasing the probe into pressure contactwith the vibration detecting means; means for effecting coarsedisplacement of the probe in the Z direction; means for effecting finedisplacement of the probe in the Z direction; means for scanning theprobe in X and Y directions relative to the surface of the sample andgenerating a measurement signal; and processing means for processing themeasurement signal into a three-dimensional image.
 24. A scanning probemicroscope according to claim 23; wherein the vibration detecting meanscomprises a quartz oscillator; and wherein the probe is integrallyconnected to the quartz oscillator by the pressure applied to the probeby the biasing means.
 25. A scanning probe microscope according to claim24; wherein the biasing means comprises a leaf spring.
 26. A scanningprobe microscope according to claim 23; wherein the vibrating meanscomprises a piezoelectric vibrating body and an AC voltage generator.27. In combination with a recording-and-reproducing apparatus, ascanning probe microscope comprising: a probe extending in a Zdirection; a piezoelectric vibrating body for vibrating the proberelative to a surface of a sample; a vibration detecting device having aquartz oscillator for detecting the probe vibration; a biasing memberfor biasing the probe into pressure contact with the quartz oscillatorof the vibration detecting device to integrally connect the probe to thequartz oscillator; a coarse displacement device for effecting coarsedisplacement of the probe in the Z direction; a fine displacement devicefor effecting fine displacement of the probe in the Z direction; and ascanning device for scanning the probe in X and Y directions relative tothe surface of the sample.
 28. A scanning probe microscope according toclaim 27; wherein the biasing member comprises a leaf spring.